0131149 - FZU-D 960502 RIV GB eng J - Journal Article
Kadlec, Stanislav - Musil, Jindřich
Low-pressure magnetron sputtering and selfsputtering discharges.
Vacuum. Roč. 47, - (1996), s. 307-311. ISSN 0042-207X. E-ISSN 1879-2715
Impact factor: 0.518, year: 1996

Permanent Link: http://hdl.handle.net/11104/0029234