0587879 - ÚJF 2025 RIV US eng J - Journal Article
Banyasz, I. - Rajta, I. - Havránek, Vladimír - Pujol, M.C. - Bazso, G. - Karman, G. - Nagy, G.
Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5-6 MeV Energy Range.
ACS Omega. Roč. 9, č. 28 (2024), s. 30415-30424. ISSN 2470-1343. E-ISSN 2470-1343
R&D Projects: GA MŠMT EF16_013/0001812
Institutional support: RVO:61389005
Keywords : microbeam * glass * diffraction efficiencies
OECD category: Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
Impact factor: 3.7, year: 2023 ; AIS: 0.639, rok: 2023
Method of publishing: Open access
Result website:
https://doi.org/10.1021/acsomega.4c01695DOI: https://doi.org/10.1021/acsomega.4c01695

A method for the fabrication of high diffraction efficiency optical transmission gratings with quasi-sinusoidal profile in glasses by microbeams of medium-mass ions of 5-6 MeV energy was devised and demonstrated. Gratings with a 30 mu m grating constant have been manufactured and characterized by interference microscopy and microprofilometry. The obtained surface profiles of the gratings were found to be quasi-sinusoidal with up to 265 nm amplitude. Measured highest first-order diffraction efficiencies were around 26% in both Pyrex and IOG glasses. Such gratings could serve as coupling elements in integrated optics and photonic integrated circuits.
Permanent Link: https://hdl.handle.net/11104/0354919