Chemical vapor deposition of diamond films on qcm substrates

0575295 - FZÚ 2024 RIV SK eng C - Conference Paper (international conference)
Kromka, Alexander - Kočí, Michal - Szabó, Ondrej - Aubrechtová Dragounová, Kateřina - Vanko, G. - Izsák, T. - Varga, M.
Chemical vapor deposition of diamond films on qcm substrates.
Proceedings of ADEPT - ADEPT 2023. Žilina: University of Žilina, 2023 - (Jandura, D.; Lettrichová, I.; Kováč, jr., J.), s. 157-160. ISBN 978-80-554-1977-0.
[International Conference on Advances in Electronic and Photonic Technologies /11./ - ADEPT 2023. Podbanské (SK), 12.06.2023-15.06.2023]
R&D Projects: GA MŠMT LM2023051
Grant - others:AV ČR(CZ) SAV-23-11
Program: Bilaterální spolupráce
Institutional support: RVO:68378271
Keywords : diamond * quartz crystal microbalance * microwave plasma CVD * sensor
OECD category: Materials engineering

The quartz crystal microbalance (QCM) represents an acoustic (mass) analytical platform suitable for the detection of gases and biomolecules in air and liquid, respectively. Several studies have shown that the sensing performance, sensitivity, and selectivity of QCMs are further enhanced by using an appropriate functional layer. Among others, diamond is one such attractive material thanks to its extraordinary properties. However, the use of standard CVD diamond growth procedures at 800 °C cannot be applied to the QCM substrate due to its low phase transition temperature (570 °C). An alternative solution here offers a low- temperature (400 °C) linear antenna microwave plasma. In this work, we demonstrate technological progress in diamond growth on QCM substrates in terms of maintaining their functionality and the ability to cover both sides in one deposition cycle due to the low pressure (<15 mbar) and placement of the QCM substrate in the so-called cold plasma region.
Permanent Link: https://hdl.handle.net/11104/0345074