Optical, structural and mechanical properties of TiO.sub.2./sub. and TiO.sub.2./sub.-ZrO.sub.2./sub. thin films deposited on glass using magnetron sputtering

0574615 - FZÚ 2024 RIV NL eng J - Journal Article
Sezgin, A. - Čtvrtlík, Radim - Václavek, Lukáš - Tomáštík, Jan - Nožka, Libor - Mensur, E. - Turkuz, S.
Optical, structural and mechanical properties of TiO₂ and TiO₂-ZrO₂ thin films deposited on glass using magnetron sputtering.
Materials Today Communications. Roč. 35, June (2023), č. článku 106334. ISSN 2352-4928. E-ISSN 2352-4928
Institutional support: RVO:68378271
Keywords : thin film * titanium dioxide * zirconium oxide * sputtering * optical properties * mechanical properties
OECD category: Materials engineering
Impact factor: 3.8, year: 2022
Method of publishing: Limited access
https://doi.org/10.1016/j.mtcomm.2023.106334

In this study, the structural, optical, and mechanical properties of magnetron sputtered TiO2 and TiO2-ZrO2 mixture transparent thin films along with the effect of heat treatment were investigated. TiO2 and TiO2-ZrO2 thin films were fabricated by magnetron sputtering from ceramic targets at room temperature on both the soda-lime and the borosilicate glass substrates. Structural properties of thin films were studied via X-ray photoelectron spectroscopy (XPS), grazing incidence X-ray diffractometry (GI-XRD) and scanning electron microscopy (SEM). Optical characterizations were carried out using spectrophotometry and spectroscopic ellipsometry. The hard-ness and scratch behavior of the samples were investigated using nano-indentation and nano-scratch tests. TiO2 and ZrO2 presence in films was confirmed by XRD and XPS analysis. It was found that TiO2-ZrO2 films show higher hardness values compared to TiO2 thin films.
Permanent Link: https://hdl.handle.net/11104/0346948