Effects of monoatomic and cluster bombardment with Ar ion beam on the surface of hydrogenated nanocrystalline diamond

0574374 - FZÚ 2024 RIV NL eng J - Journal Article
Romanyuk, Olexandr - Zemek, Josef - Houdková, Jana - Babčenko, Oleg - Shagieva, Ekaterina - Beranová, Klára - Kromka, Alexander - Jiříček, Petr
Effects of monoatomic and cluster bombardment with Ar ion beam on the surface of hydrogenated nanocrystalline diamond.
Diamond and Related Materials. Roč. 133, March (2023), č. článku 109748. ISSN 0925-9635. E-ISSN 1879-0062
R&D Projects: GA MŠMT(CZ) LUASK22147
Grant - others:AV ČR(CZ) StrategieAV21/26
Program: StrategieAV
Institutional support: RVO:68378271
Keywords : nanocrystalline diamond * hydrogen * Ar ions * amorphization * XPS * Raman spectroscopy * EPES * REELS
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 4.1, year: 2022
Method of publishing: Open access with time embargo
https://doi.org/10.1016/j.diamond.2023.109748

In the paper, we prepared a hydrogenated nanocrystalline diamond (NCD-H) film by the chemical vapor deposition (CVD) method. A variable degree of NCD-H surface destruction and surface graphitization was achieved by Ar ion bombardment using monoatomic beam (Ar+) and cluster ion beam (ArCIB). Bombardment with ArCIB manifests itself by the formation of a very thin altered layer on the surface of NCD-H accompanied by no Ar atoms embedded in the surface region. In contrast, bombardment with Ar+ beam leads to the creation of thicker, homogeneous altered layer characterized by dominating C sp2 hybridization, by the embedded Ar atoms, and by the reduced dimensions of diamond grains located near the surface of the samples. Furthermore, we evaluate the contribution of the C-Hx bonds to the asymmetry of the C 1s core level line shape and to measure the H concentration on the surface.

Permanent Link: https://hdl.handle.net/11104/0344706