Highly regular LIPSS on thin molybdenum films: optimization and generic criteria

0571931 - FZÚ 2024 RIV CH eng J - Journal Article
Sládek, Juraj - Hlinomaz, Kryštof - Mirza, M. Inam - Levy, Yoann - Derrien, Thibault - Cimrman, Martin - Nagisetty, S.S. - Čermák, Jan - Stuchlíková, The-Ha - Stuchlík, Jiří - Bulgakova, Nadezhda M.
Highly regular LIPSS on thin molybdenum films: optimization and generic criteria.
Materials. Roč. 16, č. 7 (2023), č. článku 2883. E-ISSN 1996-1944
R&D Projects: GA MŠMT EF15_003/0000445; GA MŠMT EF15_006/0000674
Grant - others:OP VVV - BIATRI(XE) CZ.02.1.01/0.0/0.0/15_003/0000445; OP VVV - HiLASE-CoE(XE) CZ.02.1.01/0.0/0.0/15_006/0000674
Institutional support: RVO:68378271
Keywords : laser-induced periodic surface structures * highly regular LIPSS * thin film * molybdenum
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 3.4, year: 2022
Method of publishing: Open access

A systematic experimental study was performed to determine laser irradiation conditions for the large-area fabrication of highly regular laser-induced periodic surface structures (HR-LIPSS) on a 220 nm thick Mo film deposited on fused silica. The LIPSS were fabricated by scanning a linearly polarized, spatially Gaussian laser beam at 1030 nm wavelength and 1.4 ps pulse duration over the sample surface at 1 kHz repetition rate. Scanning electron microscope images of the produced structures were analyzed using the criterion of the dispersion of the LIPSS orientation angle (DLOA). Favorable conditions, in terms of laser fluence and beam scanning overlaps, were identified for achieving DLOA values <10∘ . To gain insight into the material behavior under these irradiation conditions, a theoretical analysis of the film heating was performed, and surface plasmon polariton excitation is discussed. A possible effect of the film dewetting from the dielectric substrate is deliberated.
Permanent Link: https://hdl.handle.net/11104/0342825