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Contamination mitigation strategy for SEMs

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    0571242 - ÚPT 2023 RIV CZ eng O - Others
    Müllerová, Ilona - Materna Mikmeková, Eliška - Konvalina, Ivo
    Contamination mitigation strategy for SEMs.
    2022
    R&D Projects: GA TA ČR(CZ) TN01000008
    Institutional support: RVO:68081731
    Keywords : contamination * low energy electron microscopy * 2D crystals
    OECD category: Materials engineering

    Müllerová, I., Materna-Mikmeková, E., Konvalina, I. Contamination mitigation strategy for SEMs. TN01000008/30-V003. 2022. Contamination in modern electron microscopy is at the forefront of interest and mainly concerns the deposition of a carbon based film on the surface from adsorbed hydrocarbons. The report deals with effects describing the growth/removal of contamination caused by electron irradiation and to describe in detail the influence of electron beam parameters on the balance between deposition and desorption processes.
    Permanent Link: https://hdl.handle.net/11104/0342513

     
     
Number of the records: 1  

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