Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon

0570669 - FZÚ 2024 RIV GB eng J - Journal Article
Weiss, Zdeněk - Ashcheulov, Petr - Lambert, Nicolas - Taylor, Andrew - Lorinčik, J. - Sung, Kil-dong - Davydova, Marina - Mortet, Vincent
Analysis of boron- and phosphorus-doped diamond layers by glow discharge optical emission spectroscopy in argon and neon.
Vacuum. Roč. 210, April (2023), č. článku 111890. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA ČR(CZ) GA20-03187S; GA ČR(CZ) GA21-03538S; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : diamond * glow discharge optical emission spectroscopy * boron * phosphorus * argon * neon
OECD category: Analytical chemistry
Impact factor: 4, year: 2022
Method of publishing: Open access with time embargo
https://doi.org/10.1016/j.vacuum.2023.111890

Boron- and phosphorus-doped diamond layers were analysed by glow discharge optical emission spectroscopy. A methodology for quantitative depth profiling of layers was developed, based on multi-matrix calibration with a calibration model assuming matrix-independent emission yields. Factors affecting accuracy and sensitivity of analysis are discussed. Analysis of boron with the B I line at 208.959 nm yielded a satisfactory performance. Analysis of phosphorus with the P I line at 178.284 nm in an argon glow discharge is affected by an argon-related interference, which can be avoided by using a neon discharge. The use of which leads to an eightfold improvement in the phosphorus detection limit. A light interference effect affecting the analysis in transparent layers is described, indicating that layers are transparent far into the ultraviolet region.
Permanent Link: https://hdl.handle.net/11104/0342000