Effect of oxygen defects on microstructure, optical and vibrational properties of ScN films deposited on MgO substrate from experiment and first principles

0569725 - FZÚ 2024 RIV NL eng J - Journal Article
More Chevalier, Joris - Wdowik, U. D. - Legut, D. - Cichoň, Stanislav - de Prado, Esther - Gregora, Ivan - Bulíř, Jiří - Novotný, Michal - Fekete, Ladislav - Lančok, Ján
Effect of oxygen defects on microstructure, optical and vibrational properties of ScN films deposited on MgO substrate from experiment and first principles.
Applied Surface Science. Roč. 615, Apr. (2023), č. článku 156203. ISSN 0169-4332. E-ISSN 1873-5584
Research Infrastructure: e-INFRA CZ - 90140
Institutional support: RVO:68378271
Keywords : oxidation * X-ray photoelectron spectroscopy * scandium nitride * thin film
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 6.7, year: 2022
Method of publishing: Limited access
https://doi.org/10.1016/j.apsusc.2022.156203

We report on the effects of oxygen impurities on the microstructure, surface morphology, optical absorption, and vibrational properties of scandium nitride thin films deposited onto magnesium oxide substrate by reactive magnetron sputtering and under ultrahigh vacuum conditions. Two distinct deposition temperatures of 700 ◦C and 800 ◦C were applied to adjust the level of oxygen contamination. The ScN/MgO(001) thin films have been characterized by various spectroscopic methods, including X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy, Raman spectroscopy, and optical microscopy.
Permanent Link: https://hdl.handle.net/11104/0341751