High-speed multi-beam nanostructuring techniques at HiLASE with up to 40401 beams and 1910 cm.sup.2./sup./min

0568097 - FZÚ 2023 RIV US eng C - Conference Paper (international conference)
Hauschwitz, Petr
High-speed multi-beam nanostructuring techniques at HiLASE with up to 40401 beams and 1910 cm²/min.
Laser-based Micro- and Nanoprocessing XVI. Vol. 11989. Bellingham: SPIE, 2022 - (Watanabe, A.; Kling, R.), č. článku 119890O. ISBN 978-1-5106-4850-0. ISSN 0277-786X. E-ISSN 1996-756X.
[SPIE LASE. San Francisco (US), 22.01.2022-28.02.2022]
R&D Projects: GA MŠMT EF15_006/0000674
EU Projects: European Commission(XE) 739573 - HiLASE CoE
Grant - others:OP VVV - HiLASE-CoE(XE) CZ.02.1.01/0.0/0.0/15_006/0000674
Institutional support: RVO:68378271
Keywords : high-speed multi-beam * nanostructuring techniques
OECD category: Optics (including laser optics and quantum optics)
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11989/2607607/High-speed-multi-beam-nanostructuring-techniques-at-HiLASE-with-up/10.1117/12.2607607.short

Suitable topography of structured surfaces may allow attaining innovative surface properties including friction reduction, superhydrophobicity, self-cleaning, anti-icing and many more. Despite a list of attractive applications of functional surfaces and demonstrated capability of lasers to produce them, the speed of laser micro and nanostructuring is still low with respect to many industry standards. In this work, we introduce a unique combination of high-energy pulsed ultrashort laser system HiLASE PERLA with up-to-date most promising multi-beam micro and nanostructuring technologies able to produce for example more than 40,000 beamlets with productivity over 1900 cm2/min.
Permanent Link: https://hdl.handle.net/11104/0339451