Chamber with inverted electrode geometry for measuring and control of ion flux-energy distribution functions

0567159 - FZÚ 2023 RIV CH eng J - Journal Article
Schulze, Ch. - Li, H. - Mohn, L. - Müller, Martin - Benedikt, J.
Chamber with inverted electrode geometry for measuring and control of ion flux-energy distribution functions.
Plasma. Roč. 5, č. 3 (2022), s. 295-305. E-ISSN 2571-6182
Research Infrastructure: CzechNanoLab - 90110
Institutional support: RVO:68378271
Keywords : capacitively coupled plasma * inductively coupled plasma * rf bias * ion energy distribution * energy-selective mass spectrometry
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Method of publishing: Open access

Measurements of the ion flux-energy distribution functions with an energy-selective mass spectrometer at the high sheath potential of the grounded electrode are presented for a variety of conditions and ions. The potential for suppressing low-energy ions from resonant charge transfer collisions in the sheath by the dilution of the working gas is demonstrated. Additionally, the setup is supplemented by an inductively coupled plasma that controls the plasma density and consequently the ion flux to the substrate while the radio frequency bias controls the ion energy. At high ion energies, metal ions are detected as a consequence of the ionization of sputtered electrode material. The proposed setup opens a way to study precisely the effects of ion treatment for a variety of substrates such as catalysts, polymers, or thin films.
Permanent Link: https://hdl.handle.net/11104/0338436