0566734 - FZÚ 2023 RIV CH eng J - Journal Article
Cadatal-Raduban, M. - Pope, J. - Olejníček, Jiří - Kohout, Michal - Harrison, J.A. - Hasan, S.M.R.
Ultraviolet-C photoresponsivity using fabricated TiO₂ thin films and transimpedance-amplifier-based test setup.
Sensors. Roč. 22, č. 21 (2022), č. článku 8176. E-ISSN 1424-8220
R&D Projects: GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : titanium dioxide * thin film * ultraviolet * UV-C * photoconductive detector * sensor * transimpedance amplifier
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 3.9, year: 2022
Method of publishing: Open access

We report on fabricated titanium dioxide (TiO2) thin films along with a transimpedance amplifier (TIA) test setup as a photoconductivity detector (sensor) in the ultraviolet-C (UV-C) wavelength region, particularly at 260 nm. TiO2 thin films deposited on high-resistivity undoped siliconsubstrate at thicknesses of 100, 500, and 1000 nm exhibited photoresponsivities of 81.6, 55.6, and 19.6 mA/W, respectively, at 30 V bias voltage. Despite improvements in the crystallinity of the thicker films, the decrease in photocurrent, photoconductivity, photoconductance, and photoresponsivity in thicker films is attributed to an increased number of defects. Varying the thickness of the film can, however, be leveraged to control the wavelength response of the detector. Future development of a chip-based portable UV-C detector using TiO2 thin films will open new opportunities for a wide range of applications.
Permanent Link: https://hdl.handle.net/11104/0338022