Shape memory alloys and polymers for MEMS/NEMS applications: review on recent findings and challenges in design, preparation, and characterization

0563780 - FZÚ 2023 RIV CH eng J - Journal Article
Stachiv, Ivo - Alarcón Tarquino, Eduardo - Lamač, Marcel
Shape memory alloys and polymers for MEMS/NEMS applications: review on recent findings and challenges in design, preparation, and characterization.
Metals. Roč. 11, č. 3 (2021), č. článku 415. E-ISSN 2075-4701
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR(CZ) GC21-12994J
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : shape memory alloy * shape memory polymer * functional structures * thin film * NiMn2Ga * phase transformation * MEMS * NEMS * functional devices * multilayer
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 2.695, year: 2021
Method of publishing: Open access

In this review, we discuss the recent understanding and progress in the fields of the SMAs and SMPs. Particular attention will be given to the existing challenges, critical issues, limitations, and achievements in the preparation and characterization of the SMPs and NiTi-based SMAs thin films, and their heterostructures for MEMS/NEMS applications including both experimental and computational approaches. Examples of the recent MEMS/NEMS devices utilizing the unique properties of SMAs and SMPs such as micropumps, microsensors or tunable metamaterial resonators are highlighted. In addition, we also introduce the prospective future research directions in the fields of SMAs and SMPs for the nanotechnology applications.
Permanent Link: https://hdl.handle.net/11104/0335588