Ni-Au layers on sapphire prepared by direct current magnetron sputtering

0563460 - ÚJF 2023 RIV GB eng J - Journal Article
Mikšová, Romana - Jagerová, Adéla - Poustka, D. - Macková, Anna
Ni-Au layers on sapphire prepared by direct current magnetron sputtering.
Radiation Effects and Defects in Solids. Roč. 177, 11-12 (2022), s. 1288-1299. ISSN 1042-0150. E-ISSN 1029-4953
R&D Projects: GA MŠMT EF16_013/0001812
Research Infrastructure: CANAM II - 90056
Institutional support: RVO:61389005
Keywords : Bimetallic layer * SEM * magnetron sputtering * RBS
OECD category: Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
Impact factor: 1, year: 2022
Method of publishing: Limited access
https://doi.org/10.1080/10420150.2022.2136091

Thin bimetallic Ni-Au layers (similar to 100 nm) with three different Au content were prepared by direct current magnetron sputtering onto sapphire substrates. The elemental composition and the layer thickness of bimetallic layers were controlled during the sputtering process. The prepared Ni-Au layers were annealed at temperatures of 400 degrees C and 900 degrees C in the air to determine the behavior of Au and Ni in the layers after heating. The elemental composition and depth profiling was provided by Rutherford backscattering spectrometry (RBS). The surface morphology was examined via Scanning electron microscopy (SEM). RBS measurement revealed inter-diffusion Au into sapphire substrate after thermal annealing and the formation of grains and voids.
Permanent Link: https://hdl.handle.net/11104/0338172