Development and measurement of gas sensors for room temperature applications

0557351 - FZÚ 2023 RIV CZ eng C - Conference Paper (international conference)
Kočí, Michal
Development and measurement of gas sensors for room temperature applications.
Proceedings of the Student International Conference on Electrical Engineering /26./. Prague: Czech Technical University in Prague, 2022 - (Husník, L.), s. 70-72. ISBN 978-80-01-06992-9.
[Student International Conference on Electrical Engineering - POSTER 2022 /26./. Prague (CZ), 12.05.2022-12.05.2022]
Grant - others:AV ČR(CZ) SAV-21-10
Program: Bilaterální spolupráce
Institutional support: RVO:68378271
Keywords : gas sensor * nanocrystalline diamond (NCD) * transition metal dichalcogenide (TMD)
OECD category: Materials engineering
http://poseidon2.feld.cvut.cz/conf/poster/proceedings/POSTER_2022.pdf

Gas sensing properties of a nanocrystalline diamond with a hydrogen-terminated surface (H-terminated NCD) and a molybdenum disulphide (MoS2) are investigated as conductivity sensors with built-in interdigital metal electrode structures. The H-terminated NCD was prepared by plasma-enhanced chemical vapour deposition (PECVD), and the MoS2 by a carbide-free one-zone sulfurization method. The sensor's responses were measured for oxidizing (NO2) and reducing (NH3) gases by the same equipment and setup. The parameters of the tested sensors are compared and critically evaluated. Advantageously, the MoS2/H-terminated NCD heterostructure enhances the gas sensing response at room temperature compared to the H-terminated NCD and MoS2 layers.
Permanent Link: http://hdl.handle.net/11104/0331389