A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge

0552302 - FZÚ 2022 RIV GB eng J - Journal Article
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge.
Plasma Sources Science & Technology. Roč. 30, č. 4 (2021), č. článku 045003. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA MPO FV20580; GA ČR GA19-00579S
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : hollow cathode discharge * magnetron sputtering discharge * positively biased anode * Langmuir probe diagnostics * energy-resolved ion mass spectrometry
OECD category: Coating and films
Impact factor: 4.124, year: 2021
Method of publishing: Open access

The performance of a positively biased external ring anode in combination with a hollow cathode (HC) discharge or a magnetron sputtering (MS) discharge, both with a Ti cathode and with Ar as working gas, is investigated. Plasma and floating potential increase as function of anode voltage. Energy-resolved mass spectrometry reveals that the kinetic energy of argon and titanium ions is enhanced by a positive anode voltage allowing for an effective energy control of plasma ions.
Permanent Link: http://hdl.handle.net/11104/0327434