Long-term changes in Al thin-film extreme ultraviolet filters

0550989 - ÚFP 2022 RIV US eng J - Journal Article
Schmidt, Jiří - Koláček, Karel - Frolov, Oleksandr - Štraus, Jaroslav - Hoffer, Petr - Stelmashuk, Vitaliy - Tuholukov, Andrii - Jiříček, Petr - Houdková, Jana
Long-term changes in Al thin-film extreme ultraviolet filters.
Applied Optics. Roč. 60, č. 28 (2021), s. 8766-8773. ISSN 1559-128X. E-ISSN 2155-3165
R&D Projects: GA MŠMT(CZ) LTC20061; GA MŠMT LTT17015; GA ČR(CZ) GA18-12386S
Grant - others:European Cooperation in Science and Technology(BE) CA17126; AV ČR(CZ) StrategieAV21/6
Program: COST; StrategieAV
Institutional support: RVO:61389021 ; RVO:68378271
Keywords : Al thin-film * extreme ultraviolet filters * Al2O3
OECD category: Optics (including laser optics and quantum optics); Optics (including laser optics and quantum optics) (FZU-D)
Impact factor: 1.905, year: 2021
Method of publishing: Limited access
https://www.osapublishing.org/ao/abstract.cfm?uri=ao-60-28-8766

Thin-film Al filters are very popular owing to their high transmittance in the wavelength range of 17–67 nm and low transmittance in the visible and near-UV regions, however, they are prone to oxidation. The amorphous Al2O3 layers on the Al surfaces have much smaller transmittance than the bulk Al material - therefore, they strongly influence the total transmittance of the filter. This paper not only provides the transmittance of very old Al filters but also maps the transmittance development of Al filters over two years since their delivery (in 2016) in an uncontrolled atmosphere.
Permanent Link: http://hdl.handle.net/11104/0326266