Trajectory displacement in a multi beam scanning electron microscope

0549399 - ÚPT 2022 RIV NL eng J - Journal Article
Stopka, Jan - Zuidema, W. - Kruit, P.
Trajectory displacement in a multi beam scanning electron microscope.
Ultramicroscopy. Roč. 223, April (2021), č. článku 113223. ISSN 0304-3991. E-ISSN 1879-2723
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : Trajectory displacement * Multi-beam electron microscope * Coulomb interactions * Slice method * Electron optics
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 2.994, year: 2021
Method of publishing: Open access
https://www.sciencedirect.com/science/article/pii/S030439912100019X

The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system.
Permanent Link: http://hdl.handle.net/11104/0325417