Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon

0549211 - FZÚ 2022 RIV GB eng J - Journal Article
Tarasenko, Alexander - Čtvrtlík, Radim - Kudělka, R.
Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon.
Scientific Reports. Roč. 11, č. 1 (2021), č. článku 2845. ISSN 2045-2322. E-ISSN 2045-2322
R&D Projects: GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : surface acoustic waves * laser acoustic method * silicon
OECD category: Acoustics
Impact factor: 4.997, year: 2021
Method of publishing: Open access

The phase velocity dispersion of the surface acoustic waves on a basal plane of Si(100) has been calculated in the whole range of the azimuthal angle of propagation. We present a detailed description of the calculations. These calculations are compared with the experimental data obtained by a laser acoustic method. Our data convincingly demonstrate the existence of a gap in the spectrum of the phase velocities. The gap means that in a definite range of the phase velocities the SAWs are absent in the whole interval of the azimuthal angles. There is an excellent coincidence between the numerical and experimental data.
Permanent Link: http://hdl.handle.net/11104/0325236