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Hydrogen-terminated diamond surface as a gas sensor: a comparative study of its sensitivities

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    0546561 - FZÚ 2022 RIV CH eng J - Journal Article
    Kočí, Michal - Kromka, Alexander - Bouřa, A. - Szabó, Ondrej - Husák, M.
    Hydrogen-terminated diamond surface as a gas sensor: a comparative study of its sensitivities.
    Sensors. Roč. 21, č. 16 (2021), č. článku 5390. E-ISSN 1424-8220
    R&D Projects: GA MŠk(CZ) EF16_019/0000760; GA MŠk LM2018110
    Grant - others: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; AV ČR(CZ) SAV-21-10
    Program: Bilaterální spolupráce
    Institutional support: RVO:68378271
    Keywords : nanocrystalline diamond (NCD) * metal oxide (MOX) * gas detectors
    OECD category: Materials engineering
    Impact factor: 3.847, year: 2021
    Method of publishing: Open access

    A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commercial sensors, a conductivity sensor with a metal oxide (MOX) active material (resistance change), and an infrared pyroelectric sensor (output voltage change) in this study. The deposited layer structure is characterized and analyzed by Scanning Electron Microscopy (SEM) and Raman spectroscopy. Electrical properties (resistance change for conductivity sensors and output voltage change for the IR pyroelectric sensor) are examined for two types of gases, oxidizing (NO2) and reducing (NH3). The parameters of the tested sensors are compared and critically evaluated. Subsequently, differences in the gas sensing principles of these conductivity sensors are described.
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