Pulsed laser deposition of high-transparency molybdenum oxide thin films

0546155 - FZÚ 2022 RIV GB eng J - Journal Article
Holovský, Jakub - Horynová, E. - Horák, L. - Ridzoňová, Katarína - Remeš, Zdeněk - Landová, Lucie - Sharma, R.K.
Pulsed laser deposition of high-transparency molybdenum oxide thin films.
Vacuum. Roč. 194, Sept. (2021), č. článku 110613. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GC19-02858J
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : molybdenum oxide * pulsed laser deposition * spectral ellipsometry * photothermal deflection spectroscopy * X-ray diffraction
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 4.110, year: 2021
Method of publishing: Limited access
https://doi.org/10.1016/j.vacuum.2021.110613

Molybdenum oxide is an intensively studied material, thanks to its high bandgap, high work function, and potentially also photochromism, plasmonic properties, and layered structure. In this contribution, we employ Pulsed Laser Deposition (PLD) from stoichiometric MoO3 and metal Mo target at temperature range of 25 °C – 500 °C and oxygen pressure variation of 0.1 mbar – 0.4 mbar to deposit high transparency MoO3 layers. The combination of Photothermal Manuscript File Click here to view linked ReferencesDeflection Spectroscopy (PDS) and Spectral Ellipsometry is applied to accurately track all the optical properties. The X-ray diffraction and Scanning Electron Microscopy (SEM) are used to monitor crystallinity and surface morphology.
Permanent Link: http://hdl.handle.net/11104/0322789