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Beam shaping and probe characterization in the scanning electron microscope

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    0543063 - ÚPT 2022 RIV NL eng J - Journal Article
    Řiháček, Tomáš - Horák, M. - Schachinger, T. - Mika, Filip - Matějka, Milan - Krátký, Stanislav - Fořt, Tomáš - Radlička, Tomáš - Johnson, C. W. - Novák, L. - Seďa, B. - McMorran, B.J. - Müllerová, Ilona
    Beam shaping and probe characterization in the scanning electron microscope.
    Ultramicroscopy. Roč. 225, June (2021), č. článku 113268. ISSN 0304-3991. E-ISSN 1879-2723
    R&D Projects: GA TA ČR(CZ) TN01000008
    Institutional support: RVO:68081731
    Keywords : Electron diffraction * SEM * Electron beam structuring * Spot shape measurement * Electron vortex beam
    OECD category: Particles and field physics
    Impact factor: 2.994, year: 2021
    Method of publishing: Open access
    https://www.sciencedirect.com/science/article/pii/S0304399121000589

    Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.
    Permanent Link: http://hdl.handle.net/11104/0320365

     
     
Number of the records: 1