Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

0541452 - ÚFP 2022 RIV US eng C - Conference Paper (international conference)
Kredba, J. - Stašík, M. - Mach, M. - Matoušek, O. - Karabyn, Vasyl
Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry.
Proceedings of SPIE. Vol. 11490. Bellingham: SPIE, 2020, č. článku 1149010. ISBN 978-1-5106-3787-0.
[Conference on Interferometry XX. ELECTR NETWORK (US), 24.08.2020-04.09.2020]
Institutional support: RVO:61389021
Keywords : DFB diodes * Fourier transform * Frequency-tuned interferometry * Ghost fringes * Phase-shifting interferometry * Surface topography measurement
OECD category: Optics (including laser optics and quantum optics)
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11490/2568732/Surface-form-characterization-of-plane-parallel-elements-using-frequency-tuned/10.1117/12.2568732.short?SSO=1

Plane-parallel optical elements, such as optical resonators, laser rods or wave plates, are widely used in many optical setups. Both planar surfaces of the element have to be manufactured with high precision in order to assure proper quality of the element and thus these surfaces have to be accurately measured. However, the interferometric measurement process, usually used for the surface form topography characterization, suffers from multiple interference patterns. This increases the total measurement error. In this paper the frequency-tuned interferometric method, that overcomes this problem, is demonstrated and compared to commonly used techniques using immersion liquid. Using a tunable laser source together with a frequency separation of the phase information from both surfaces, fringes from the first and second surface can be distinguished. Also, the interference between both surfaces can be used to obtain the wedge and thickness values of the specimen.
Permanent Link: http://hdl.handle.net/11104/0319003