Optimization of diamond growth on structured, soft and brittle substrates

0540749 - FZÚ 2021 RIV US eng C - Conference Paper (international conference)
Babčenko, Oleg - Izsák, Tibor - Varga, Marián - Aubrechtová Dragounová, Kateřina - Potocký, Štěpán - Stehlík, Štěpán - Vanko, G. - Gajdošová, L. - Kasemann, S. - Zehetner, J. - Kromka, Alexander
Optimization of diamond growth on structured, soft and brittle substrates.
Proceedings of the 13th International Conference on Advanced Semiconductor Devices And Microsystems. New York: IEEE, 2020 - (Vanko, G.; Izsák, T.), s. 46-50, č. článku 20469. ISBN 978-1-7281-9776-0.
[International Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /13./. Smolenice (SK), 11.10.2020-14.10.2020]
R&D Projects: GA MŠMT LM2018110; GA MŠMT(CZ) 8X20035; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : diamond film * CVD * nucleation * carbon foam
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

Diamond has become an attractive material not only for fundamental research but also for industrial uses due to the extraordinary combination of its intrinsic properties. Its chemical vapor deposition is routinely done over the world on a large variety of substrates. However, the diamond high surface energy hinders its growth on foreign substrates. Therefore, optimizing the (pre-) growth technological step, known as nucleation or seeding step, is crucial to enhance the initial formation of diamond nuclei. Here, we present ultrasonic seeding and polymer-nanodiamond composite as promising nucleation techniques suitable for various substrates. The ultrasonic seeding is shown as a universal nucleation platform for nearly any substrate of complex and 3D-shape geometry. The complementary nucleation from polymer-nanodiamond is useful for the nucleation of soft and brittle materials.

Permanent Link: http://hdl.handle.net/11104/0318355