Emission spectroscopic diagnostics of weakly ionized argon-diluted plasmas: glow discharge and inductively coupled plasma

0540408 - FZÚ 2021 RIV GB eng J - Journal Article
Weiss, Zdeněk
Emission spectroscopic diagnostics of weakly ionized argon-diluted plasmas: glow discharge and inductively coupled plasma.
Plasma Sources Science & Technology. Roč. 29, č. 10 (2020), s. 1-19, č. článku 105018. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : transition rate diagrams * transfer excitation processes * charge-transfer * probabilities * spectrometer * calibration * hydrogen * ionization * glow discharge * inductively coupled plasma * emission spectroscopy * Boltzmann plots * transition rate diagrams * local thermodynamic equilibrium * Cu,Mn,Ti,Fe,Cr
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.584, year: 2020
Method of publishing: Limited access
https://doi.org/10.1088/1361-6595/abb41e

An extensive study of Mn, Fe, Ti, Cr, Cu emission spectra from a Grimm-type glow discharge and an inductively coupled plasma (ICP), in argon, was performed, using the formalism of population functions (experimental Boltzmann plots) and transition rate diagrams. Emission characteristics of both spectral sources were compared. In both discharges the excitation of neutral metal atoms (Me I) is dominated by electron impact (EI) and in the excitation of singly charged ions (Me II) the charge transfer between Ar+ ions and Me I plays a significant role, especially in GDOES. Deviations from local thermodynamic equilibrium (LTE) were identified and classified. Experimental ‘excitation temperatures’ follow a pattern predicted by computer simulations with a collisional-radiative model: they are lower than the actual electron temperature, while this deviation is greater for the Me I system than Me II.

Permanent Link: http://hdl.handle.net/11104/0318021