Number of the records: 1
Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection
- 1.0538978 - FZÚ 2021 RIV US eng J - Journal Article
Hofmann, S. - Lejček, Pavel - Zhou, G. - Yang, H. - Lian, S.Y. - Kovač, J. - Wang, J.Y.
Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection.
Journal of Vacuum Science and Technology. Part B. Nanotechnology & Microelectronics. Roč. 38, č. 3 (2020), s. 1-7, č. článku 034010. ISSN 2166-2746. E-ISSN 2166-2754
Institutional support: RVO:68378271
Keywords : SIMS * depth resolution * secondary clusters * MRI model
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 1.416, year: 2020
Method of publishing: Limited access
https://doi.org/10.1116/6.0000108
The apparent improvement of the depth resolution in secondary ion mass spectrometry depth profiles using cluster secondary ions as compared to single ion profiles is explained on basis of an attractive interaction enhancing cluster formation.
Permanent Link: http://hdl.handle.net/11104/0316709
Number of the records: 1