Correlation between crystallization and oxidation process of ScN films exposed to air

0538073 - FZÚ 2021 RIV NL eng J - Journal Article
More Chevalier, Joris - Cichoň, Stanislav - Horák, L. - Bulíř, Jiří - Hubík, Pavel - Gedeonová, Zuzana - Fekete, Ladislav - Poupon, Morgane - Lančok, Ján
Correlation between crystallization and oxidation process of ScN films exposed to air.
Applied Surface Science. Roč. 515, Jun (2020), s. 1-11, č. článku 145968. ISSN 0169-4332. E-ISSN 1873-5584
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA17-05770S; GA MŠMT EF16_013/0001406; GA MŠMT(CZ) LO1409; GA MŠMT(CZ) LM2015088
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; OP VVV - SAFMAT(XE) CZ.02.1.01/0.0/0.0/16_013/0001406
Institutional support: RVO:68378271
Keywords : scandium nitride * oxidation * X-ray photoelectron spectroscopy * thin film
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 6.707, year: 2020
Method of publishing: Limited access
https://doi.org/10.1016/j.apsusc.2020.145968

Oxidation and hydrolysis are two spontaneous reactions occurring when scandium nitride (ScN) is exposed to air (oxygen and humidity). In order to evaluate the detrimental effect of the oxidation on functional properties of the material, ScN films were prepared under ultrahigh vacuum conditions at 700 °C onto two different substrates, crystalline MgO(0 0 1) and amorphous fused silica. X-ray Photoelectron Spectroscopy analysis was performed to study the oxidation reactions. The study also employed vacuum transferred pristine samples. Crystalline quality and oxidation resistance were found to be strongly correlated. Degradation of electrical and optical properties was observed for polycristalline films prepared on fused silica.
Permanent Link: http://hdl.handle.net/11104/0315894