Fabrication of black aluminium thin films by magnetron sputtering

0538068 - FZÚ 2021 RIV GB eng J - Journal Article
More Chevalier, Joris - Novotný, Michal - Hruška, Petr - Fekete, Ladislav - Fitl, Přemysl - Bulíř, Jiří - Pokorný, Petr - Volfová, Lenka - Havlová, Šárka - Vondráček, Martin - Lančok, Ján
Fabrication of black aluminium thin films by magnetron sputtering.
RSC Advances. Roč. 10, č. 35 (2020), s. 20765-20771. E-ISSN 2046-2069
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA MŠMT EF16_013/0001406; GA MŠMT(CZ) LO1409; GA MŠMT(CZ) LM2015088; GA ČR GA18-09347S
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; OP VVV - SAFMAT(XE) CZ.02.1.01/0.0/0.0/16_013/0001406
Institutional support: RVO:68378271
Keywords : black aluminium * magnetron sputtering * nitrogen * black metal
OECD category: Coating and films
Impact factor: 3.361, year: 2020
Method of publishing: Open access
https://doi.org/10.1039/d0ra00866d

Black aluminium thin films were prepared by direct current (DC) pulsed magnetron sputtering. The N2 concentration in the Ar–N2 mixture that was used as the deposition atmosphere was varied from 0 to 10%, and its impact on the film growth and optical properties was studied. A strong change in the film growth process was observed as a function of the N2 concentration. At a specific N2 concentration of 6%, the Al film growth process favoured the formation of a moth-eye-like antireflective surface. This surface morphology, which was similar to the structure of a cauliflower, is known to trap incident light,resulting in films with a very low reflectivity.

Permanent Link: http://hdl.handle.net/11104/0315891