The optical emission spectroscopy of the inductively coupled plasma used for modification of chemical, optical and electronic properties of nanostructured ZnO

0537899 - FZÚ 2021 RIV CZ eng A - Abstract
Remeš, Zdeněk - Mičová, J. - Rezek, B. - Hsu, H.-S.
The optical emission spectroscopy of the inductively coupled plasma used for modification of chemical, optical and electronic properties of nanostructured ZnO.
Book of Abstracts of the 30^th Joint Seminar of the Development of Materials Science in Research and Education. Praha: Institute of Physics of the Czech Academy of Sciences, 2020 - (Kožíšek, Z.; Král, R.; Zemenová, P.). s. 50-50. ISBN 978-80-907237-1-9.
[Joint Seminar of the Development of Materials Science in Research and Education /30./. 07.09.2020-11.09.2020, Pavlov]
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GC19-02858J
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : ZnO * OES * PDS * photoluminescence
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

Plasma treatment of the nanostructured surface of thin films has increasingly attracted the attention of scientists and technologists due to the high surface-to-volume ratio and related size effects. The surface and size effects impose challenges for energy conversion or sensing applications, i.e., in solar cells, optoelectronic devices, gas sensors, or electrochemical energy storage. The plasma modification of surfaces by plasma processing provides further adjustment of properties for application. The plasma treatment is done in a novel inductively coupled plasma (ICP) reactor and monitored in-situ by optical emission spectroscopy (OES) in the spectral range 350-1050 nm.
Permanent Link: http://hdl.handle.net/11104/0315731