Number of the records: 1
Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography
- 1.0536751 - ÚPT 2021 RIV US eng C - Conference Paper (international conference)
Šarbort, Martin - Holá, Miroslava - Pavelka, Jan - Řeřucha, Šimon - Oulehla, Jindřich - Fořt, Tomáš - Lazar, Josef
Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography.
Imaging and Applied Optics Congress. Proceedings. Washington: OSA, 2020. ISBN 978-1-943580-77-4.
[Imaging and Applied Optics Congress. Washington (US), 22.06.2020-26.06.2020]
R&D Projects: GA TA ČR(CZ) TN01000008; GA MŠMT(CZ) EF16_026/0008460; GA MŠMT ED0017/01/01; GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : focus sensor * optical metrology * rough topography
OECD category: Optics (including laser optics and quantum optics)
https://www.osapublishing.org/abstract.cfm?URI=DH-2020-HTh5H.2
We compare three focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. The laser beam was modulated by three specific computer-generated holograms displayed on a spatial light modulator.
Permanent Link: http://hdl.handle.net/11104/0314472
Number of the records: 1