Ion beam figuring with using Einzel lens

0536126 - ÚFP 2021 RIV US eng C - Conference Paper (international conference)
Karabyn, Vasyl - Polák, Jaroslav - Procháska, František - Melich, Radek
Ion beam figuring with using Einzel lens.
SPIE: Optics and Measurement 2019 International Conference. Bellingham: SPIE, 2019, Roč. 11385 (2019), č. článku 1138508. ISBN 978-1-5106-3548-7.
[Optics and Measurement International Conference. Liberec (CZ), 08.10.2019-10.10.2019]
Institutional support: RVO:61389021
Keywords : Dwell-time correction * Einzel lens * focused ion beam * ion beam figuring
OECD category: Fluids and plasma physics (including surface physics)
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11385/2542822/Ion-beam-figuring-with-using-Einzel-lens/10.1117/12.2542822.short

Ion Beam Figuring (IBF) has been used for nearly 20 years by several laboratories and companies as a highly deterministic method of final processing of ultra-precision optical elements. Nowadays, requirements for high precision optics demand to have full control over the ion beam, which includes both the ion beam profile and intensity. Electrostatic focusing using an Einzel lens setup provides a simple option to control the ion beam shape by changing voltage. This experimental study investigates the early stage development of an Einzel lens used to control an RF40 ion source. First results demonstrate the possibility to use an Einzel lens to control the ion beam profile and indicate possible future challenges this technology has to overcome when used in IBF machines.
Permanent Link: http://hdl.handle.net/11104/0313951