Micromachining of invar with 784 beams using 1.3 ps laser source at 515 nm

0535198 - FZÚ 2021 RIV CH eng J - Journal Article
Hauschwitz, Petr - Stoklasa, B. - Kuchařík, J. - Turčičová, Hana - Písařík, Michael - Brajer, Jan - Rostohar, Danijela - Mocek, Tomáš - Duda, Martin - Lucianetti, Antonio
Micromachining of invar with 784 beams using 1.3 ps laser source at 515 nm.
Materials. Roč. 13, č. 13 (2020), s. 1-9, č. článku 2962. E-ISSN 1996-1944
R&D Projects: GA MŠMT EF15_006/0000674; GA MŠMT LO1602; GA TA ČR(CZ) TN01000008
EU Projects: European Commission(XE) 739573 - HiLASE CoE
Grant - others:OP VVV - HiLASE-CoE(XE) CZ.02.1.01/0.0/0.0/15_006/0000674
Institutional support: RVO:68378271
Keywords : multi-beam micromachining * beam splitting * invar * shadow masks * OLED 1
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 3.623, year: 2020
Method of publishing: Open access

To fulfil the requirements for high-resolution organic light-emitting diode (OLED) displays, precise and high-quality micrometer-scale patterns have to be fabricated inside metal shadow masks. Invar has been selected for this application due to its unique properties, especially a low coefficient of thermal expansion. In this study, a novel cost-efficient method of multi-beam micromachining of invar will be introduced. The combination of a Meopta beam splitting, focusing and monitoring module with a galvanometer scanner and HiLASE high-energy pulse laser system emitting ultrashort pulses at 515 nm allows drilling and cutting of invar foil with 784 beams at once with high precision and almost no thermal effects and heat-affected zone, thus significantly improving the throughput and efficiency.
Permanent Link: http://hdl.handle.net/11104/0313284