Microcapacitors on graphene oxide and synthetic polymers prepared by microbeam lithography

0534240 - ÚJF 2021 RIV NL eng J - Journal Article
Malinský, Petr - Romanenko, Oleksandr V. - Havránek, Vladimír - Stammers, James H. - Hnatowicz, Vladimír - Cutroneo, Mariapompea - Novák, Josef - Slepička, P. - Svorčík, V. - Szokolova, K. - Bouša, D. - Sofer, Z. - Macková, Anna
Microcapacitors on graphene oxide and synthetic polymers prepared by microbeam lithography.
Applied Surface Science. Roč. 528, OCT (2020), č. článku 146802. ISSN 0169-4332. E-ISSN 1873-5584
R&D Projects: GA ČR GA19-02482S; GA MŠMT EF16_013/0001812
Institutional support: RVO:61389005
Keywords : Polymers * Graphene oxide * ion-beam writing * chemical properties * microcapacitors
OECD category: Coating and films
Impact factor: 6.707, year: 2020
Method of publishing: Limited access
https://doi.org/10.1016/j.apsusc.2020.146802

Carbon-ion microbeam writing was employed for the mask-less production of microscale capacitors in insulating graphene oxide (GO), polyimide (PI) and poly(methyl-methacrylate) (PMMA) foils. The substrates were irradiated by a 5 MeV C beams with micrometer-scale resolution to create conducive strips. The morphology and quality of the created microstructures and compositional changes in the host matrix under the ion microbeam irradiation were studied using scanning electron microscopy and energy-dispersive X-ray spectroscopy. The changes in the structure and elemental composition of the irradiated areas were characterised by Raman microspectroscopy, X-ray photoelectron spectroscopy, Rutherford backscattering spectroscopy and elastic recoil detection analysis. The microcapacitors with the highest capacitance (in the order of pF) were those prepared on the GO surface. On the other hand, in PI and PMMA, the same carbon-ion irradiation does not induce such a significant enhancement of electric properties and the capacity of the resulting capacitor-like structures is substantially lower.
Permanent Link: http://hdl.handle.net/11104/0312467