Time-resolved diagnostics of a bipolar HiPIMS discharge

0533971 - FZÚ 2021 RIV US eng J - Journal Article
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Time-resolved diagnostics of a bipolar HiPIMS discharge.
Journal of Applied Physics. Roč. 127, č. 20 (2020), s. 1-10, č. článku 203303. ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA19-00579S; GA MPO FV30177
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : HiPIMS * bipolar * emission spectroscopy * yttrium * mass spectroscopy * energy resolved
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.546, year: 2020
Method of publishing: Limited access
https://doi.org/10.1063/5.0006425

Bipolar high power impulse magnetron sputtering (HiPIMS) with a yttrium target is investigated with the help of time-resolved diagnostics. The bipolar HiPIMS discharge is operated with a negative pulse with a width of 100 μs, which is immediately followed by a positive pulse (pulse voltage up to +60 V) with a duration of ~310 μs. The time-resolved floating potential first rises to a large positive voltage of ~55V at the beginning of the positive pulse (+60 V) and after 30 μs drops to ~38 V. It indicates the ignition of a reversed discharge. Further evidence of such a reversed discharge is confirmed by time-resolved mass spectrometry and time-resolved optical emission spectroscopy.
Permanent Link: http://hdl.handle.net/11104/0312193