Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor

0533159 - FZÚ 2021 RIV GB eng J - Journal Article
Vokoun, David - Kadeřávek, Lukáš - Balogová, Jarmila - Fekete, Ladislav - Landa, Michal - Drahokoupil, Jan - Němeček, J. - Heller, Luděk
Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor.
Smart Materials and Structures. Roč. 29, č. 1 (2020), s. 1-10, č. článku 015001. ISSN 0964-1726. E-ISSN 1361-665X
R&D Projects: GA ČR(CZ) GA17-05360S; GA ČR GA18-03834S; GA ČR(CZ) GA17-05360S; GA MŠMT(CZ) LO1409; GA MŠMT(CZ) LM2015088
Grant - others:FUNBIO(XE) CZ.2.16/3.1.00/21568
Institutional support: RVO:68378271 ; RVO:61388998
Keywords : NiTi film * Xe FIB * MEMS * AFM * resonant ultrasound spectroscopy * sensor fabrication
OECD category: Materials engineering; Materials engineering (UT-L)
Impact factor: 3.585, year: 2020
Method of publishing: Limited access
https://doi.org/10.1088/1361-665X/ab4e0c

Resonance based mass sensors are able to sense tiny fractions of grams based on the resonant frequency shift of a resonator when the resonator is subjected to changes in attached mass or temperature. In our work, NiTi/Si micro-bridge with a design of tunable resonance based sensor was fabricated using Xe plasma FIB. Before fabricating the micro-bridge, an influence of various Xe FIB currents on the transformational behavior of NiTi films was tested. In the other part of the present study, the effect of temperature on the vibrating NiTi/Si micro-bridge was examined in a broad range of frequencies. It is suggested that the NiTi film can work as a frequency tuning element in resonance based mass sensors. The shift of the first resonant frequencies of NiTi/Si bilayer micro-bridge with the length, width, thickness and the NiTi/Si thickness ratio being 200 μm, 40 μm, 5.8 μm and 0.29, respectively, is up to 7 % with temperature ranging from 25°C to 100°C during heating up.

Permanent Link: http://hdl.handle.net/11104/0311637