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Comparison of GO and polymer microcapacitors prepared by ion beam writing

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    0525636 - ÚJF 2021 RIV US eng J - Journal Article
    Malinský, Petr - Romanenko, Oleksandr V. - Havránek, Vladimír - Hnatowicz, Vladimír - Stammers, James H. - Cutroneo, Mariapompea - Novák, Josef - Slepička, P. - Švorčík, V. - Szokolova, K. - Bouša, D. - Sofer, Z. - Macková, Anna
    Comparison of GO and polymer microcapacitors prepared by ion beam writing.
    Surface and Interface Analysis. Roč. 52, č. 12 (2020), s. 1171-1177. ISSN 0142-2421. E-ISSN 1096-9918
    R&D Projects: GA ČR GA19-02482S; GA MŠMT LM2015056; GA MŠMT EF16_013/0001812
    Institutional support: RVO:61389005
    Keywords : chemical properties * graphene oxide * ion beam writing * microcapacitors * PMMA
    OECD category: Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
    Impact factor: 1.607, year: 2020
    Method of publishing: Limited access
    https://doi.org/10.1002/sia.6851

    Carbon beam writing was employed as a method for maskless production of microscale capacitors in both insulating graphene oxide (GO) and poly(methyl methacrylate) (PMMA) matrix. The GO and PMMA foils were irradiated using a 5-MeV C(3+)beam with micrometer scale resolution. As follows, the shape of the created microstructures and compositional changes was studied using the scanning electron microscopy/energy-dispersive X-ray spectroscopy method (SEM/EDS). The structural and compositional progression was characterized by Raman spectroscopy, Rutherford backscattering spectroscopy (RBS), and elastic recoil detection analysis (ERDA) spectroscopy. The improvement of the prepared structures' electrical properties was also studied, and it can be concluded that carbon irradiation leads to the removal of oxygen and hydrogen and to growth of the carbon domains, which is connected with the conductivity increase of the irradiated parts and capacitance of the final products in the order of pF.
    Permanent Link: http://hdl.handle.net/11104/0312720

     
     
Number of the records: 1  

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