The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography

0525371 - ÚJF 2021 RIV US eng J - Journal Article
Romanenko, Oleksandr V. - Slepička, P. - Malinský, Petr - Cutroneo, Mariapompea - Havránek, Vladimír - Stammers, James H. - Švorčík, V. - Macková, Anna
The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography.
Surface and Interface Analysis. Roč. 52, č. 12 (2020), s. 1040-1044. ISSN 0142-2421. E-ISSN 1096-9918
R&D Projects: GA ČR GA19-02482S; GA MŠMT LM2015056; GA MŠMT EF16_013/0001812
Institutional support: RVO:61389005
Keywords : gold nanoparticles * ion beam lithography * microstructure * PDMS * shrinkage
OECD category: Nano-materials (production and properties)
Impact factor: 1.607, year: 2020
Method of publishing: Limited access
https://doi.org/10.1002/sia.6821

3D microstructures in pure poly(dimethylsiloxane) (PDMS) and PDMS with embedded Au nanoparticles were prepared by ion beam lithography without any further etching. Two mega-electron volts helium and 10 MeV oxygen ions were used for ion microstructuring. Parallel lines of 1 mm in length and 10 mu m in thickness were fabricated for investigation of the effect of the nanoparticles presence in the polymer on the surface morphology of the created microstructures. The created microstructures were checked by optical microscope. Infrared (IR) spectrometry was used to study the effect of the ions type and fluence on the chemical changes of the material. Atomic force microscopy was used for the fine detail study as well as for checking the microstructure quality. Analysis revealed an increased radiation resistance of the nanocomposite compared to the pure PDMS. Shrinkage is proportional to the fluence, but the maximum value for both materials is limited by saturation. 3D microstructure in modified PDMS obtained at the same irradiation condition as pure PDMS is characterized by its smaller height. Obtaining the microstructure in nanocomposite of the same height as in pure PDMS by increasing the fluence can be impossible due to saturation of shrinkage and/or radiation-induced heating of the material.
Permanent Link: http://hdl.handle.net/11104/0312722