Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

0525112 - ÚPT 2021 RIV CH eng J - Journal Article
Skoupý, Radim - Fořt, Tomáš - Krzyžánek, Vladislav
Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration.
Nanomaterials. Roč. 10, č. 2 (2020), č. článku 332. E-ISSN 2079-4991
R&D Projects: GA ČR GA17-15451S; GA MPO(CZ) FV30271
Institutional support: RVO:68081731
Keywords : SEM * quantitative imaging * back-scattered electrons * standardless calibration * electron mirror * sample bias * Monte Carlo simulation * thin coating layers
OECD category: Nano-materials (production and properties)
Impact factor: 5.076, year: 2020
Method of publishing: Open access
https://www.mdpi.com/2079-4991/10/2/332

The thickness of electron transparent samples can be measured in an electron microscope using several imaging techniques like electron energy loss spectroscopy (EELS) or quantitative scanning transmission electron microscopy (STEM). We extrapolate this method for using a back-scattered electron (BSE) detector in the scanning electron microscope (SEM). This brings the opportunity to measure the thickness not just of the electron transparent samples on TEM mesh grids, but, in addition, also the thickness of thin films on substrates. Nevertheless, the geometry of the microscope and the BSE detector poses a problem with precise calibration of the detector. We present a simple method which can be used for such a type of detector calibration that allows absolute (standardless) measurement of thickness, together with a proof of the method on test samples.
Permanent Link: http://hdl.handle.net/11104/0309322