Relation between optical and microscopic properties of hydrogenated silicon thin films with integrated germanium and tin nanoparticles

0522709 - FZÚ 2022 RIV CZ eng C - Conference Paper (international conference)
Stuchlík, Jiří - Stuchlíková, The-Ha - Čermák, Jan - Kupčík, Jaroslav - Fajgar, Radek - Remeš, Zdeněk
Relation between optical and microscopic properties of hydrogenated silicon thin films with integrated germanium and tin nanoparticles.
NANOCON 2018 : Conference Proceedings of the International Conference on Nanomaterials - Research & Application /10./. Ostrava: Tanger Ltd., 2019 - (Shrbená, J.), s. 83-87. ISBN 978-80-87294-89-5.
[NANOCON 2018 -International Conference on Nanomaterials - Research and Application /10./. Brno (CZ), 17.10.2018-19.10.2018]
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA MŠMT(CZ) LTC17029; GA ČR GC16-10429J
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271 ; RVO:67985858
Keywords : thin films * a-Si:H * nanoparticles * germanium * tin
OECD category: Condensed matter physics (including formerly solid state physics, supercond.); Inorganic and nuclear chemistry (UCHP-M)

The hydrogenated amorphous silicon layers (a-Si:H) were deposited by PECVD method on quartz substrates. During interruption of PECVD process the vacuum chamber was pumped up to 10-5 Pa and 1 nm thin films of Germanium or Tin were evaporated on the surface. The materials form isolated nanoparticles (NPs) on the a-Si:H surface. Then the deposited NPs were covered and stabilized by a-Si:H layer by PECVD. Those two deposition processes were alternated 5 times. The a-Si:H thin films with integrated Ge or Sn NPs were characterized optically by PDS and CPM methods, and microscopically by SEM and AFM microscopies. Optical and microscopic properties of the structures are correlated and discussed considering their application in photovoltaics.

Permanent Link: http://hdl.handle.net/11104/0307159