Erbium-ion implantation of single- and nano-crystalline ZnO

0522518 - ÚJF 2021 RIV NL eng J - Journal Article
Cajzl, J. - Nekvindová, P. - Jeníčková, K. - Jagerová, Adéla - Malinský, Petr - Remeš, Zdeněk - Neykova, Neda - Chang, Yu-Ying - Oswald, Jiří - Kentsch, U. - Macková, Anna
Erbium-ion implantation of single- and nano-crystalline ZnO.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 464, č. 2 (2020), s. 65-73. ISSN 0168-583X. E-ISSN 1872-9584
R&D Projects: GA MŠMT LM2015056; GA MŠMT EF16_013/0001812; GA ČR GA18-03346S
Institutional support: RVO:68378271 ; RVO:61389005
Keywords : ZnO * nanocrystalline thin films * Erbium * ion implantation * luminescence
OECD category: Materials engineering; Condensed matter physics (including formerly solid state physics, supercond.) (FZU-D)
Impact factor: 1.377, year: 2020
Method of publishing: Limited access
https://doi.org/10.1016/j.nimb.2019.11.039

This paper reports on the results of Er+ ion implantation into various ZnO structures - standard single crystal c-plane (0001) ZnO, nanostructured thin films and nanorods. Er+ ions were implanted using an ion implantation energy of 400 keV and implantation fluences in the range of 5 x 10(14) to 5 x 10(15) ions/cm(2). Er concentration depth profiles and the degree of crystal damage were measured using Rutherford backscattering spectrometry (RBS) and RBS/channelling (RBS/C). Additionally, Raman spectroscopy was used to analyse structural modifications of the prepared samples. The main focus was placed on the luminescence properties of various ZnO structures. The results showed that the characteristic bands of ZnO, i.e. near-band-edge (NBE) luminescence and deep-level emission (DLE) - that can be influenced by the excitation wavelength - appeared in the spectra of single crystals and nanorods. The characteristic luminescence bands of erbium ions in the NIR region appeared in non-annealed ZnO single-crystal samples and nano-crystalline films.
Permanent Link: http://hdl.handle.net/11104/0306997