Assessing the thickness error rate of quantitative STEM measurements

0521571 - ÚPT 2020 RS eng A - Abstract
Skoupý, Radim - Krzyžánek, Vladislav
Assessing the thickness error rate of quantitative STEM measurements.
MCM 2019. 14th Multinational Congress on Microscopy. Proceedings. Belgrade: University of Belgrade, 2019. s. 107-109. ISBN 978-86-80335-11-7.
[Multinational Congress on Microscopy /14./. 15.09.2019-20.09.2019, Belgrade]
R&D Projects: GA ČR GA17-15451S; GA MPO(CZ) FV30271; GA TA ČR(CZ) TN01000008
Institutional support: RVO:68081731
Keywords : qSTEM * BSE signal
OECD category: Nano-materials (production and properties)

Quantitative scanning transmission electron microscopy (qSTEM) analysis is one of the few methods which provide determination of sample thickness in an electron microscope. We focus in more detail on the accuracy of such type of thickness determination. To compare individual detector segments and their accuracy we used – analogically to our previous work with a BSE signal – a sample with a thickness known in each point – a latex nanosphere with a nominal diameter of 616 nm (S130-6, Agar Scientific, United Kingdom). We measured the diameter of 575 nm in the case of the shown particle. The accurate diameter was assessed for each particle during the image processing.
Permanent Link: http://hdl.handle.net/11104/0306173