Er implantation into various cuts of ZnO - experimental study and DFT modelling

0520885 - ÚJF 2021 RIV CH eng J - Journal Article
Nekvindová, P. - Cajzl, J. - Macková, Anna - Malinský, Petr - Oswald, Jiří - Bottger, R. - Yatskiv, Roman
Er implantation into various cuts of ZnO - experimental study and DFT modelling.
Journal of Alloys and Compounds. Roč. 816, č. 3 (2020), č. článku 152455. ISSN 0925-8388. E-ISSN 1873-4669
R&D Projects: GA ČR GA18-03346S; GA MŠMT EF16_013/0001812
Institutional support: RVO:61389005 ; RVO:68378271 ; RVO:67985882
Keywords : Erbium * ZnO * Ion implantation * Density functional theory modelling * Rutherford backscattering spectroscopy
OECD category: Composites (including laminates, reinforced plastics, cermets, combined natural and synthetic fibre fabrics; Inorganic and nuclear chemistry (FZU-D); Electrical and electronic engineering (URE-Y)
Impact factor: 5.316, year: 2020
Method of publishing: Limited access
https://doi.org/10.1016/j.jallcom.2019.152455

his paper presents a DFT study of the positions of erbium ions in the ZnO structure as well as experimental study of Er ion implantation into different crystallographic cuts of ZnO. The theoretical simulations have compared cohesive energies and defect-formation energies for different Er positions in the wurtzite ZnO structure. In the experimental part, single-crystal ZnO substrates were implanted with Er+ ions at an energy of 190 keV using fluences of 1 x 10(16) and 5 x 10(16) ion.cm(-2). The ion implantation was followed by the application of the thermal annealing in oxygen atmosphere at 1000 degrees C for 5 h. The RBS/channelling method with fine scans was used to study the positions of erbium ions and structure recovery during the annealing process. The Er-doped ZnO samples exhibited clear luminescence in the NIR spectral region at around 1.5 mu m. This work provides new results on the comparison of erbium ion implantation into different polar and non-polar crystallographic cuts of ZnO, resulting in different luminescence properties of the samples. Experimental and theoretical results are compared as well.
Permanent Link: http://hdl.handle.net/11104/0305552