Advanced techniques for low- and very-low energy SEM using reflected and transmitted signals

0519852 - ÚPT 2020 RS eng A - Abstract
Müllerová, Ilona - Daniel, Benjamin - Konvalina, Ivo - Frank, Luděk - Materna Mikmeková, Eliška
Advanced techniques for low- and very-low energy SEM using reflected and transmitted signals.
MCM 2019. 14th Multinational Congress on Microscopy. Proceedings. Belgrade: University of Belgrade, 2019. s. 98-99. ISBN 978-86-80335-11-7.
[Multinational Congress on Microscopy /14./. 15.09.2019-20.09.2019, Belgrade]
R&D Projects: GA TA ČR(CZ) TE01020118
Institutional support: RVO:68081731
Keywords : very-low energy electron microscopy * very-low energy electron microscopy
OECD category: Electrical and electronic engineering

There is a need for new diagnostic techniques to be developed for the study of new materials. The scanning low-energy electron microscope (SLEEM) equipped with a cathode lens in a specimen region offers an innovative tool that enables samples at nanometre lateral resolution in both reflected (RE) and transmitted electrons (TE) to be seen. This diagnostics can be helpful for the study of freestanding graphene samples as well as other 2D materials. Interest in thin- and most notably 2D-materials is due to their unique physical properties that manifest when heat transport and charge is confined to a plane. Furthermore, layered 2D materials exhibit a combination of excellent electronic, mechanical, optical and thermal properties, which may substitute the commonly used materials in electronics, photonics, catalysis, biosensors, etc. and offer many innovative applications. 2D materials appear the most suitable candidates for the creation of a new generation of electronic devices, many examples of which have already been practically realized.
Permanent Link: http://hdl.handle.net/11104/0304834