Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA

0518743 - ÚJF 2020 RIV NL eng J - Journal Article
Romanenko, Oleksandr V. - Havránek, Vladimír - Malinský, Petr - Slepička, P. - Stammers, James H. - Švorčík, V. - Macková, Anna - Fajstavr, D.
Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 461, č. 12 (2019), s. 175-180. ISSN 0168-583X. E-ISSN 1872-9584
R&D Projects: GA MŠMT EF16_013/0001812; GA MŠMT LM2015056; GA ČR GA19-02482S
Institutional support: RVO:61389005
Keywords : heavy ion beam lithography * PMMA film * microstructuring * shrinkage * swelling
OECD category: Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
Impact factor: 1.270, year: 2019
Method of publishing: Limited access
https://doi.org/10.1016/j.nimb.2019.09.043

Our research is devoted to the shrinkage and swelling of PMMA film after micro-structuring with ion beam lithography. 10 MeV O4+ ions were used in the experiment. Parallel lines of 1 mm in length and 10 mu m in thickness were created. The number of scan cycles and ion fluence were varied. The influence of the irradiation regime on PMMA elemental composition in micro-structured parts and microstructure morphology were studied. It was shown that microstructures created in PMMA film undergo both shrinkage and swelling processes depending on both the scan speed and the fluence. For the same fluence, shrinkage appears at fast scan speeds and swelling at slow ones. The same phenomenon was found in relation to the fluence for the same scan speed. It was observed that PMMA film rupture caused by irradiation occurred prior to the start of the carbonization of the irradiated area.
Permanent Link: http://hdl.handle.net/11104/0303804