Nanocrystalline diamond films heavily doped by boron: structure, optical and electrical properties

0511648 - FZÚ 2020 RIV US eng C - Conference Paper (international conference)
Volodin, V.A. - Cherkova, S.G. - Kumar, V. - Sachkov, V.A. - Mortet, Vincent - Taylor, Andrew - Remeš, Zdeněk - Stuchlíková, The-Ha - Stuchlík, Jiří
Nanocrystalline diamond films heavily doped by boron: structure, optical and electrical properties.
International Conference on Micro- and Nano-Electronics 2018. Bellingham: SPIE, 2019 - (Lukichev, V.; Rudenko, K.), s. 1-10, č. článku 110221G. Proceedings of SPIE, 11022. ISBN 978-1-5106-2709-3. ISSN 0277-786X.
[International Conference on Micro- and Nano-Electronics 2018. Zvenigorod (RU), 01.10.2018-05.10.2018]
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA17-05259S; GA MŠMT(CZ) LTC17029; GA AV ČR(CZ) Fellowship J. E. Purkyně
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; AV ČR(CZ) Fellowship J. E. Purkyně
Program: Fellowship J. E. Purkyně
Institutional support: RVO:68378271
Keywords : nanocrystalline boron doped diamond films * Raman scattering * phonon confinement * Fano interference
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

A set of nanocrystalline diamond films was grown using microwave plasma enhanced chemical vapor deposition on fused silica substrates from methane diluted by hydrogen: with and without the addition of trimethylborane. The boron to carbon ratio in the gas phase was varied from 0 to 8000 ppm. The boron doped nanocrystalline diamond films were investigated using atomic-force microscopy, Raman spectroscopy, transmittance spectroscopy and electro-physical methods. For analysis of Raman spectra of heavily doped p-type nanocrystalline diamond using Fano contour one should take into account the shift and broadening of the phonon line due to phonon confinement in grains, or phonon scattering by defects. Raman spectra were calculated using a phonon confinement model and Fano contour. Good agreement was found between the calculated and experimental spectra.
Permanent Link: http://hdl.handle.net/11104/0301880