Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target

0511402 - GLÚ 2020 RIV GB eng J - Journal Article
Křenek, T. - Mikysek, Petr - Pola, M. - Vála, L. - Melaré, E. - Jandová, Věra - Vavruňková, V. - Rieger, D.
Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target.
IOP Conference Series: Materials Science and Engineering. Roč. 613, č. 1 (2019), č. článku 012016. ISSN 1757-8981
Institutional support: RVO:67985831 ; RVO:67985858
Keywords : pulsed laser deposition * zirconium oxides * FTIR spectroscopy * Zr-O films * X-ray diffraction
OECD category: Fluids and plasma physics (including surface physics); Inorganic and nuclear chemistry (UCHP-M)
Method of publishing: Open access
https://iopscience.iop.org/article/10.1088/1757-899X/613/1/012016/pdf

There is a growing interest about the possibilities for preparation of various zirconium oxides from scientific as well as application point of view. Laser ablation of solid target consisting of sintered grains of metallic hexagonal Zr₃O and monoclinic ZrO₂ results in evaporation of Zr, O species (ions, atoms) and subsequent deposition of Zr-O film. Ta and Cu have been used as substrates. The films were analyzed by SEM-EDX, Raman and FTIR spectroscopy and X-ray diffraction. SEM analysis revealed µm/sub-µm sized roundshape and ring-like objects on continuous coat. Using Raman spectroscopy broad peaks which can suggest partial laser induced amorphization of Zr-O deposits were detected. FTIR spectroscopy shows bands which are assignable to Zr-O vibration of nanostructured zirconia. X-ray diffraction analysis provides more explicit assignment of deposited phases where the deposit on Ta exhibits presence of monoclinic ZrO₂, oxygen deficient rhombohedric Zr₃O and interestingly indicates presence of high-pressure orthorhombic ZrO₂ phase. The coat on Cu consists of monoclinic ZrO₂, rhombohedric Zr₃O, and metastable tetragonal ZrO₂ phase.
Permanent Link: http://hdl.handle.net/11104/0305693