Electrical and optical characteristics of boron doped nanocrystalline diamond films

0511026 - FZÚ 2020 RIV GB eng J - Journal Article
Stuchlíková, The-Ha - Remeš, Zdeněk - Mortet, Vincent - Taylor, Andrew - Ashcheulov, Petr - Stuchlík, Jiří - Volodin, V.A.
Electrical and optical characteristics of boron doped nanocrystalline diamond films.
Vacuum. Roč. 168, Oct (2019), s. 1-4, č. článku 108813. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA17-05259S; GA AV ČR(CZ) Fellowship J. E. Purkyně
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; AV ČR(CZ) Fellowship J. E. Purkyně
Program: Fellowship J. E. Purkyně
Institutional support: RVO:68378271
Keywords : Raman spectroscopy * boron doped diamond * photothermal deflection spectroscopy
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 2.906, year: 2019
Method of publishing: Limited access
https://doi.org/10.1016/j.vacuum.2019.108813

Boron doped diamond is a prospective material which can be used as a conductive and optically transparent thin-film electrode in a variety of optoelectronic applications. In this work, we present the results of the temperature resolved electrical conductivity, optical reflection, transmission and absorption of thin boron doped nanocrystalline diamond films grown by a microwave plasma enhanced chemical vapor deposition. Optical transmittance, reflectance and absorptance properties of layers were studied by a photo-thermal deflection spectroscopy analysis. Raman spectroscopy with various excitation wavelengths was employed for the analysis of nanocrystalline diamond layers. The measured position, shift and broadening of the characteristic boron doped diamond Raman lines were used for the determination of the boron concentration. Correlation between the results of the atomic boron concentration estimated via the Raman analysis and measured electrical conductivity values is presented.

Permanent Link: http://hdl.handle.net/11104/0301381