Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

0510668 - FZÚ 2020 RIV JP eng J - Journal Article
Amano, R. - Dinh, TH. - Sasanuma, A. - Arai, G. - Hara, H. - Fujii, Y. - Hatano, T. - Ejima, T. - Jiang, W. - Sunahara, A. - Takahashi, A. - Nakamura, D. - Okada, T. - Sakaue, K. - Miura, Taisuke - O'Sullivan, G. - Higashiguchi, T.
Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas.
Japanese Journal of Applied Physics. Roč. 57, č. 7 (2018), s. 1-5, č. článku 070311. ISSN 0021-4922. E-ISSN 1347-4065
R&D Projects: GA MŠMT LO1602; GA ČR GA16-12960S
Grant - others:AV ČR(CZ) JSPS-16-13
Program: Bilaterální spolupráce
Institutional support: RVO:68378271
Keywords : mid-IR laser pulses * EUV lithography applications * EUV emissions
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 1.471, year: 2018
Method of publishing: Limited access
https://doi.org/10.7567/jjap.57.070311

We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15 ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10 ns to optimize efficient EUV emission using Sn and Gd targets.
Permanent Link: http://hdl.handle.net/11104/0301085