Micro ion beam used to optimize the quality of microstructures based on polydimethylsiloxane

0510339 - ÚJF 2020 RIV NL eng J - Journal Article
Cutroneo, Mariapompea - Havránek, Vladimír - Macková, Anna - Torrisi, Alfio - Flaks, Josef - Slepička, P. - Torrisi, L.
Micro ion beam used to optimize the quality of microstructures based on polydimethylsiloxane.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 459, č. 11 (2019), s. 137-142. ISSN 0168-583X. E-ISSN 1872-9584
R&D Projects: GA ČR GA19-02482S; GA MŠMT EF16_013/0001812; GA MŠMT LM2015056
Institutional support: RVO:61389005
Keywords : micro ion beam * Polydimethylsiloxane * microstructuring * surface characterization
OECD category: Materials engineering
Impact factor: 1.270, year: 2019
Method of publishing: Limited access
https://doi.org/10.1016/j.nimb.2019.08.033

Ion micro beam was employed to fabricate microstructures based on poly(dimethylsiloxane) (PDMS). Carbon ions with energy of 6.0 MeV were used. The ion treatment induces modifications in PDMS surface and on the optical properties as a function of the Ion current and fluence. PDMS foils were produced from commercially available two component addition materials. The selective modifications of the polymer were studied for applications in micro-fluids, micro-optics and micro-electronics. The comparison between the unirradiated and irradiated PDMS was investigated in morphology and compactness using the atomic force microscopy. The wetting ability of the PDMS surface was also analyzed as a function of the ion microbeam irradiation. The compositional and optical changes in PDMS were monitored by Rutherford backscattering spectrometry, elastic recoil detection analysis and optical spectroscopy measurements.
Permanent Link: http://hdl.handle.net/11104/0300851