Creation and detection of electron vortex beams in a scanning electron microscope

0510323 - ÚPT 2020 DE eng A - Abstract
Řiháček, Tomáš - Mika, Filip - Horák, M. - Schachinger, T. - Matějka, Milan - Krátký, Stanislav - Müllerová, Ilona
Creation and detection of electron vortex beams in a scanning electron microscope.
Microscopy Conference: MC 2019. Abstracts. Berlin: DSE, 2019. s. 409-410.
[Microscopy Conference : MC 2019. 01.09.2019-05.09.2019, Berlin]
R&D Projects: GA TA ČR(CZ) TN01000008
Institutional support: RVO:68081731
Keywords : detection of electron vortex beams * SEM
OECD category: Nano-materials (production and properties)
https://www.microscopy-conference.de

Although knowledge on electron vortex beams (EVB) has significantly developed since their first experimental observation, all experiments and applications have been considered almost solely in the (scanning) transmission electron microscope ((S)TEM). Our aim is to apply this tool in the scanning electron microscope (SEM).
Determining the probe structure in SEM is rather challenging task since there is no conventional tool for visualizing the spot. Scanning over a sample, which consists of an appropriate contrasting pattern, and collecting secondary electrons (SE) can be used. Since the contrasting structure effectively serves as a detector, we further refer it as a detection structure (DS). To reach better resolution of the beam structure, dimensions of DS must be significantly
reduced. However, the measured signal decreases with diminishing surface area of DS. For small DS size and low current, this method does not provide a sufficiently strong signal.
Permanent Link: http://hdl.handle.net/11104/0300832